ZYGO Metrology

DaW designed several large-scale metrology products for Zygo, IPEC Precision, and ADE. Development went beyond the enclosure design to integrating robotics, wafer handling systems, optical mounting and manipulation, as well as management of pilot production. This cabinet was divided internally between electronics and the isolated optical section. DaW developed a large scale casting with 5-axis machining to get the tolerances required for the optics and replaced the more conventional and expensive aluminum plate construction.